Checking date: 31/05/2021

Course: 2021/2022

Microsystems and nanoelectronics
Study: Master in Electronic Systems Engineering and Applications (304)

Coordinating teacher: ACEDO GALLARDO, PABLO

Department assigned to the subject: Department of Electronic Technology

Type: Electives
ECTS Credits: 3.0 ECTS


Requirements (Subjects that are assumed to be known)
The students are expected to have completed the mandatory courses of the Master, specially the course on Electronic, photonic and electrooptic components.
Knowledge on the last advances on different electronic and components devices. Knowledge on the current state-of-the-art on microsystems and nanoelectronics and their potential applications. Knowledge on the fundamentals of MEMS (Microelectromechanical Systems) and MOEMS (Micro-Opto-Electro-Mechanical Systems) and their use in different applications. Knowledge on microscreen technologies and their different applications. Knowledge on the new nanoelectronic technologies, materials and components that are slowly being incorporated to high added value electronic systems in fields like nanotechnology and bioengineering.
Skills and learning outcomes
Description of contents: programme
In a great number of electronic systems, microsystems like microscreens, MEMS and MOEMS are embedded. In this course the different existing technologies will be presented like those based on liquid crystals, their applications and the challenges associated to the interconnection of such components to other subsystems. Another field of recent interest is nanoelectronics with new technologies, components and materials that are being incorporated in new systems and applications. These new nanoelectronic techniques and components as well as the associated methodologies to incorporate them in electronic systems of high added value will be presented, using examples based on real applications in fields like nanotechnology and bioengineering. 1.- Introduction to Electronic Microsystems and MEMS: History, applications, design and fabrication, integration and packing, etc. 2.- Microsystems Design Fundamentals. Examples. 3.- Optical MEMs: Introduction, chronology, classification. Optical MEMs for displays and optical Communication. 4.- Liquid crystals, micro-screens and displays. 5.- Introduction to Nanoelectronics and Fundamentals: Electronic Properties and Quantum Effects 6.- Technological Aspects: Fabrication and new materials. 7.- Nanoelectronic Logic Devices 8.- Nanoelectronic Sensors and Sensors arrays 9.- Molecular Electronics and Metatronics 10.- Quantum Computing
Learning activities and methodology
LEARNING ACTIVITIES: Lectures. Tutoring hours Group work. Individual work by the students. TEACHING METHODOLOGY: Theoretical lectures in which the main concepts of the subject are developed and the bibliography is provided to complement the students' learning. Critical reading of text,s recommended by the teacher (Press articles, reports, manuals and / or academic articles) either for further discussion in class, or to expand and consolidate the knowledge of the subject. Resolution of practical cases, problems, etc. individually or in groups Exhibition and discussion in class, under the teacher's moderation, of topics related to the content of the subject, as well as case studies. Preparation of reports, either individually or in groups
Assessment System
  • % end-of-term-examination 50
  • % of continuous assessment (assigments, laboratory, practicals...) 50
Calendar of Continuous assessment
Basic Bibliography
  • Chang Liu. Foundations of MEMS. Second Edition. Prentice Hall. 2013
  • George W. Hanson. Fundamentals of Nanoelectronics. Pearson. 2009
  • Rainer Waser, Ed.. Nanoelectronics and Information Technology. Wiley-VCH. 2013
  • Stephen D. Senturia. Microsystem Design. Springer. 2001
Additional Bibliography
  • Ville Kaajakari. Practical MEMS. Small Gear Publising. 2009

The course syllabus may change due academic events or other reasons.