Checking date: 05/05/2025 14:50:30


Course: 2025/2026

Integrated Sensors and Interfaces
(20096)
Master in Microelectronic Design Engineering (Plan: 546 - Estudio: 410)
EPI


Coordinating teacher: PATON ALVAREZ, SUSANA

Department assigned to the subject: Electronic Technology Department

Type: Electives
ECTS Credits: 3.0 ECTS

Course:
Semester:




Requirements (Subjects that are assumed to be known)
Analog microelectronics
Objectives
The student will learn to: - Know the technologies involved in the most common integrated sensors in commercial devices. - Know the most common interface circuits of these sensors - Learn how to specify the noise, linearity, and sensitivity requirements of such circuits - Know noise mitigation techniques - Study specific application cases
Learning Outcomes
Description of contents: programme
1. Introduction to Micro Electromechanical Systems (MEMS) 1.1 Parts of a MEMS Sensor 1.2 Manufacturing and packaging 1.3 Types and applications 1.4 Lumped Model of a MEMS 2. Noise mitigation techniques in integrated sensors 2.1 Noise sources in an integrated sensor 2.2 CDS o Correlated Double Sampling 2.3 Chopping Amplifier 2.4 Lock-in Amplifier 2.5 Examples 3. Capacitance-to-digital converters 3.1 Types of Analog Front End: Constant Charge circuits - Reduction of area and power consumption with VCO-ADC AC bias circuits Charge amplification circuits Frequency modulated circuits 3.2 Examples 4. Resistance-to-digital converters 4.1 Types of Analog Front End 4.2 Examples 5. Microelectronic interface circuits for acceleration sensors 5.1 Special features 5.2 Examples 6. Microelectronic interface circuits for biological signals 6.1 Special features 6.2 Examples
Learning activities and methodology
The following learning activities will be used to acquire the required skills: - Theoretical classes - Practical classes with case studies and examples - Computer room or simulation practices - Group work about a scientific article or a case study
Assessment System
  • % end-of-term-examination/test 40
  • % of continuous assessment (assigments, laboratory, practicals...) 60

Calendar of Continuous assessment


Basic Bibliography
  • Chang Liu. Foundations of MEMS. Prentice Hall, second edition. 2012
  • Stephen D. Senturia. Microsystem Design. Springer. 2005

The course syllabus may change due academic events or other reasons.